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Abstract

In order to provide a single, small apparatus capable of elemental and structural analysis of inorganic matter by utilizing X-rays having non-obstructive and non-contact characteristics there is provided a small, energy distribution type X-ray detector for detecting X-ray fluorescence and subjecting the X-ray fluorescence to elemental and quantative analysis, and a CCD line sensor for performing structural analysis. An X-ray tube target structure that is a Cu layer on an Mo layer is adopted. When excitation is performed using a low accelerating voltage, this is made monochromatic by using a Cu filter to filter the Cu--K lines and the continuous X-rays generated, with the radiation quality (Cu--K lines) thus generated then being utilized in X-ray diffraction. When excitation is performed using a high accelerating voltage, Cu--K lines of the Cu--K lines, Mo--K lines and continuous X-rays thus generated are blocked by absorption using an Mo or Zr filter, with the Mo--K lines and continuous X-rays thus obtained being utilized in X-ray fluorescence analysis.

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First Claim