Measuring module

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6798513
APP PUB NO 20030193660A1
SERIAL NO

10120641

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention relates to a measuring module, whose measuring device comprises a measuring head equipped with a miniaturized measuring unit, and a spatially separately arranged control and evaluation unit, and wherein the measuring head is arranged so as to be able to slide linearly by means of a sliding drive.

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Patent Owner(s)

Patent OwnerAddress
RUDOLPH TECHNOLOGIES GERMANY GMBHGALILEO-GALILEI-STR 28 55129 MAINZ

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Abraham, Michael Mainz, DE 25 389

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