Surface treating for micromachining and method for surface treatment
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United States of America Patent
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Sep 28, 2004
Grant Date -
N/A
app pub date -
Dec 1, 2000
filing date -
Feb 27, 1998
priority date (Note) -
Expired
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Abstract
The present invention provides a micromachining surface treatment material for and a surface treatment method that suppress widening of the diameter of contact holes when removing a natural oxidation layer arising at bottom sections of the contact holes. The micromachining surface treatment material contains less than 0.1% hydrofluoric acid, and more than 40% by weight but less than or equal to 47% by weight of ammonium fluoride. Also, a surfactant is contained therein in an amount from 0.0001 to 0.1% by weight.
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