Tube target
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United States of America Patent
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Sep 21, 2004
Grant Date -
N/A
app pub date -
Nov 6, 2000
filing date -
Nov 5, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A tube target for cathode sputtering installations, and a process for producing a cylindrical hollow body for such a tube target and its use. The problem of providing a simple and low-cost process for producing a cylindrical hollow body for a tube target and of providing a cylindrical hollow body with a uniform, fine-grained structure is solved by the cylindrical hollow body being produced by centrifugal casting of a melt.
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