Method and device utilizing plasma source for real-time gas sampling
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United States of America Patent
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Sep 14, 2004
Grant Date -
Sep 26, 2002
app pub date -
Oct 29, 2001
filing date -
Nov 29, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Aspects of the present invention provide novel methods and devices for sampling gas, exciting the sampled gas to emit radiation and detecting in real time from the emitted radiation a plurality of wave bands of an emission spectrum. Energy used to excite the sampled gas may be adjusted based on the detected wave bands. A process may be controlled in real time based on the detected wave bands. Novel interfaces may be used to display portions of the detected wave bands. A known flow of a reference gas may be included in the flow of sampled gases and an unknown flow of an unknown flow gas determined.
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