Conductive probe for scanning microscope and machining method using the same
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United States of America Patent
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-
Sep 7, 2004
Grant Date -
Jan 2, 2003
app pub date -
Jul 26, 2002
filing date -
Nov 26, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A conductive probe for a scanning type microscope that captures the substance information of the surface of a specimen by the tip end of a conductive nanotube probe needle fastened to a cantilever, in which the conductive probe is constructed from a conductive film formed on the surface of the cantilever, a conductive nonatube with its base end portion being fixed in contact which the surface of a predetermined of the cantilever, and a conductive deposit which fastens the conductive nanotube by covering from the base end portion of the nonatube to a part of the conductive film. The conductive nonatube and the conductive film are electrically connected to each other by the conductive deposit.
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