Apparatus for the synthesis of layers, coatings or films
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United States of America Patent
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Sep 7, 2004
Grant Date -
Mar 20, 2003
app pub date -
Sep 20, 2001
filing date -
Sep 20, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Systems and methods are described for synthesis of films, coatings or layers. An apparatus includes a first holder; a second holder coupled to the first holder; a linkage coupled to the first holder and the second holder to move the first holder relative to the second holder; a reusable tool coupled to the first holder, the reusable tool including a raised patterned surface; and a release layer coupled to the raised patterned surface of the reusable tool.
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