Diffractive optical elements and grid polarizers in focusing spectroscopic ellipsometers
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Aug 31, 2004
Grant Date -
Dec 19, 2002
app pub date -
Jun 17, 2002
filing date -
Jun 18, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
One aspect of the present invention relates to a system and method for mitigating errors in SE data in order to determine changes in a polarization state of a source beam after interaction with a specimen. The system includes a light source for directing a source beam to a focusing optical element, a polarization system comprising a diffractive optical element or a wire grid polarizer, located between the focusing optical element and the specimen such that the source beam is polarized after being reflected from the focusing optical element. The polarized source beam is transmitted to the specimen. Changes in polarization state of the beam created by interaction with the sample are monitored to characterize the sample.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully