Time based mass flow controller and method for controlling flow rate using it
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United States of America Patent
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Aug 31, 2004
Grant Date -
Oct 2, 2003
app pub date -
Mar 29, 2002
filing date -
Dec 28, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A time based mass flow controller controls the volume flow and mass flow accurately based on time. The time based mass flow controller includes at least one reservoir 1, at least one inlet valve 13, each inlet valve 13 opening/closing an inlet of a corresponding reservoir 1, at least one outlet valve 3, each outlet valve 3 opening/closing an outlet of a corresponding reservoir 1, at least one pressure sensor, each pressure sensor detecting the gas pressure in each corresponding reservoir, and a controller for controlling the number of opening/closing loops of the inlet valve 13 and the outlet valve 3 per unit time and/or mass/volume of gas stored and discharged at the reservoir 1 per unit opening/closing loop of the inlet valve 13 and the outlet valve 3, with the inlet valve 13 opening the inlet of the reservoir 1 to allow the gas to flow into the reservoir 1 when the outlet valve 3 is in a closed state, and thereafter the outlet valve 3 opening the outlet of the reservoir 1 to allow the gas to flow out from the reservoir 1 when the inlet valve 13 is in a closed state, so that the controller may control the mass/volume flow rate of the outflow gas from the reservoir 1.
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