Inspection master block and method of producing the same
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United States of America Patent
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Aug 31, 2004
Grant Date -
Oct 31, 2002
app pub date -
Jan 28, 2002
filing date -
Feb 22, 2000
priority date (Note) -
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status (Latency Note)
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Abstract
A plurality of fixing holes are made in the upper and side faces of a hollow rectangular prism block body at least the top and four side faces of which are quartz glass or monocrystalline quartz rectangular plates. A plurality of reference members, each having a reference measuring face with which the fore end of a probe of a measuring apparatus is brought into contact, are inserted into the fixing holes, respectively, and secured in place. An inspection master block ensuring a high inspection accuracy by minimizing the effect of ambient temperature variation and a method for producing the same are thereby provided.
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