Phase shift fringe analysis method and apparatus using the same
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United States of America Patent
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Aug 17, 2004
Grant Date -
Sep 26, 2002
app pub date -
Jan 22, 2002
filing date -
Jan 31, 2001
priority date (Note) -
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status (Latency Note)
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Abstract
A phase shift fringe image analysis method comprises the steps of shifting an object to be observed and a reference relative to each other by using a phase shift device, obtaining fringe image data at three or more phase shift positions having a given phase gap therebetween, and determining a phase of the object by analyzing thus obtained plurality of fringe image data items. The positional data of at least three phase positions are specified, and the whole or part of the fringe image data on which carrier fringes at these phase positions are superposed is subjected to a predetermined arithmetic operation so as to carry out a phase analysis and determine the phase of the object.
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