Lithographic method using ultra-fine probe needle
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United States of America Patent
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Aug 17, 2004
Grant Date -
Jan 30, 2003
app pub date -
Jul 26, 2001
filing date -
Jan 22, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A lithographic method using an ultra-fine probe needle in which a base end of a nanotube is fastened to a holder with the tip end of the nanotube protruded from the holder. The tip end of the thus obtained nanotube probe needle is brought to contact a sample surface, a voltage is applied across the probe needle and sample, and the probe needle is moved while the sample substance in the area of contact of the probe needle is removed by the application of the voltage, thus forming a groove-form pattern on the sample surface.
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