Method of correcting laser beam intensity, laser beam intensity correction mechanism and multi-branched laser oscillation device having the same
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United States of America Patent
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Aug 3, 2004
Grant Date -
Jul 11, 2002
app pub date -
Jan 8, 2002
filing date -
Jan 11, 2001
priority date (Note) -
Expired
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Abstract
A laser beam oscillation device includes a laser oscillator, a reflection mirror, beam splitters and a reflection mirror leading the laser beam to optical paths, laser beam intensity correction mechanisms correcting the laser beam intensity in each optical path, and optical systems. Each of the laser beam intensity correction mechanisms includes a rotating portion rotating around an optical axis of the laser beam by moving a lever in the case, around an optical substrate slantly fixed to a rotating portion. The optical substrate is rotated around the optical axis while maintaining the Brewster's angle. Subsequently, polarizng operation adjusts transmission intensity of the laser beam such that the laser beam intensity in each optical path becomes equal to each other.
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