Multiple-pass interferometry
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United States of America Patent
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Jul 13, 2004
Grant Date -
Mar 13, 2003
app pub date -
Aug 23, 2002
filing date -
Aug 23, 2001
priority date (Note) -
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status (Latency Note)
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Abstract
Interferometry system including a multiple-pass interferometer having reflectors to reflect at least two beams along multiple passes through the interferometer, the multiple passes including a first set of passes and a second set of passes, the reflectors having first alignments that are normal to the directions of the paths of the beams that are reflected by the reflectors, the paths of the beams being sheared during the first set of passes and during the second set of passes if at least one of the reflectors has an alignment other than the first alignment, and optics to redirect the beams after the first set of passes and before the second set of passes so that shear imparted during the second set of passes cancels shear imparted during the first set of passes.
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