Method and apparatus for generating X-ray or EUV radiation
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United States of America Patent
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Jul 6, 2004
Grant Date -
Apr 18, 2002
app pub date -
Oct 12, 2001
filing date -
Oct 13, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
In a method of generating X-ray or EUV radiation, a substance is urged through an outlet to generate a jet in a direction from the outlet, at least one energy beam is directed onto the jet, the energy beam interacting with the jet to generate the X-ray or EUV radiation, and the temperature of the outlet is controlled, such that the stability of the jet is improved. An apparatus is also disclosed.
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