DC power supply apparatus for a plasma generating apparatus
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United States of America Patent
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Jul 6, 2004
Grant Date -
Jan 8, 2004
app pub date -
Aug 27, 2002
filing date -
Jul 5, 2002
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A DC power supply apparatus for supplying a DC power to a plasma generating device, includes: an input section for converting an inputted AC power into a DC power; a current type of inverter connected with a next stage of the input section; a transformer having a primary winding and a secondary winding, the primary winding being connected with the current type of inverter; a rectifying section for rectifying an AC power generated in the secondary winding of the transformer; and a smoothing circuit for smoothing the rectified power which is rectified by the rectifying section; wherein an electric energy to be supplied to the plasma generating device is controlled by controlling a switching operation of the current type of inverter as a current source.
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