Probe for scanning microscope produced by focused ion beam machining
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United States of America Patent
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Jul 6, 2004
Grant Date -
Feb 13, 2003
app pub date -
Jul 26, 2002
filing date -
Nov 26, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A scanning type microscope that captures substance information of the surface of a specimen by the tip end of a nanotube probe needle fastened to a cantilever, in which an organic gas is decomposed by a focused ion beam in a focused ion beam apparatus, and the nanotube is bonded to the cantilever with a deposit of the decomposed component thus produced. With this probe, the quality of the nanotube probe needle can be improved by removing an unnecessary deposit adhering to the nanotube tip end portion using a ion beam, by cutting an unnecessary part of the nanotube in order to control length of the probe needle and by injecting ions into the tip end portion of the nanotube.
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