Method for determining geometric structures on or in a substrate as well as material parameters
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United States of America Patent
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Jun 22, 2004
Grant Date -
N/A
app pub date -
Apr 19, 2002
filing date -
Oct 20, 1999
priority date (Note) -
Expired
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Abstract
In order to determine geometric structures and/or material parameters on or in substrates and in a locally resolved manner over the substrate surface, the invention provides the following measures: Measuring reflection and/or transmission light intensity values of the diffracted light according to the wavelength; calculating the reflection and/or transmission light intensity values using an iteration model into which the individual layer-structure and/or material parameters enter, and; modifying the parameters until the measured and calculated values coincide to the greatest possible extent.
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