Machines having drive member and method for diagnosing the same
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United States of America Patent
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-
Jun 15, 2004
Grant Date -
Aug 28, 2003
app pub date -
Feb 27, 2002
filing date -
Feb 27, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method for diagnosing a fabrication machine for a semiconductor device, in which damage condition of components for fast driving can be recognized and failure of the components can be predicted, and the machine are provided. Vibration information of a drive member is sent from a motor controller for controlling a motor connected to the drive member to a machine controller. The vibration information is stored in an information storage in the machine controller and operated in an operational processor, and condition of the drive member according to the operation results is displayed on a display unit at any time. Therefore, when some failure occurs in the drive member, the specifics can be known with the display unit without need for connecting a special analyzer or PC to the fabrication machine for a semiconductor device. Consequently, the machine is capable for self-diagnosing, and thus trouble of the drive member can be prevented from happening.
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