Magnetically shielded linear motors, and stage apparatus comprising same
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United States of America Patent
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-
Jun 15, 2004
Grant Date -
Aug 21, 2003
app pub date -
Feb 14, 2003
filing date -
Feb 18, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Stage apparatus are disclosed that provide high-accuracy positioning and movements of a stage platform, while generating reduced stray magnetic-field fluctuations and perturbations. The stage apparatus include at least one linear motor having a stator and a moving coil. Each stator includes a yoke that includes linear arrays of permanent magnets relative to which the moving coil, attached to the stage platform, moves inside a linearly extended coil gap in the yoke. A magnetic-shield plate extends around all outer surfaces and edges of the yoke as well adjacent the coil gap. The magnetic-shield plate is made of a magnetic material having high magnetic permeability.
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