Thermal type-infrared detection device and method for manufacturing the same, and array of thermal type-infrared detection device
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United States of America Patent
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Jun 15, 2004
Grant Date -
N/A
app pub date -
Apr 11, 2003
filing date -
Dec 4, 2001
priority date (Note) -
Expired
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Abstract
A thermal type-infrared detection device improved in the sensitivity and the power of output signal without deterioration of strength of the diaphragm, which is provided with a silicon substrate with a concave, a diaphragm made of an insulation material substantially covering the concave of the silicon substrate, an infrared detecting section positioned on the diaphragm, and the silicon substrate is formed with a projection made of a thermal conductor for supporting the diaphragm away from the silicon substrate.
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