Substrate testing apparatus and substrate testing method
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United States of America Patent
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Jun 8, 2004
Grant Date -
Dec 19, 2002
app pub date -
Nov 16, 2001
filing date -
Jun 12, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A substrate testing apparatus includes a first rail group made of a plurality of rails disposed in parallel with each other, a second rail group made of a plurality of rails disposed in parallel with each other in a direction that crosses the first rail group, a plurality of probe units disposed to cover respective intersections of the rails included in the first rail group and the rails included in the second rail group and being movable along the rails included in the first rail group and the second rail group, and corresponding interval maintaining means for keeping each rail included in the first rail group at an interval corresponding to an arrangement of locations to be measured on a substrate subjected to measurement, wherein the plurality of probe units each include a probing needle to be brought into contact with a surface of the substrate.
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