Electrostatic drive for accelerometer
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United States of America Patent
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Jun 8, 2004
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N/A
app pub date -
May 21, 1996
filing date -
May 21, 1996
priority date (Note) -
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Abstract
A vibratory transducer (22) for an accelerometer (2) having a pair of parallel beams (50, 52) with first and second fixed end portions, and a pair of electrodes (62, 64) positioned adjacent to the beams for generating an electrostatic force to transversely vibrate the beams at a resonant frequency. The vibration frequency of the beam is generally related to axial (i.e., compression or tension) forces applied to either one of the fixed ends of the beam so that the magnitude of the force applied can be measured by changes in the vibration frequency. The electrodes and the beams each have a plurality of fingers (82, 80) extending laterally outward so that the beam fingers and the electrode fingers are intermeshed with each other. The intermeshed fingers reduce the transducer's sensitivity to changes in applied voltage, thereby increasing the accuracy of the frequency signal. In addition, the intermeshed fingers enable the transducer to operate effectively at pressure levels substantially above vacuum to permit gas damping of the proof mass.
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