Method for determining the thickness of a multi-thin-layer structure
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jun 1, 2004
Grant Date -
N/A
app pub date -
Aug 21, 2001
filing date -
Nov 12, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
According to the inventive method for determining the thickness of at least one layer provided on a substrate, the measurement can be constructed simply and reliably and a reliable measuring result can be obtained by measuring reflection--and/or transmission light intensity values of zero order in dependence on the wavelength and calculating said reflection--and/or transmission light intensity values using an iteration model which is dependent on the individual layer parameters. The layer parameters are altered in order to introduce a consistency between the measured values and the calculated values and the substrates have geometrical structures whose geometrical dimensions are used as further parameters of the iteration model. The inventive method also provides a means of determining the geometry of structures in the substrate, for example the depth, width and the repetition interval of grooves in a blank for geometrical storage media, such as CDs.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully