Thin film LED
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United States of America Patent
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Jun 1, 2004
Grant Date -
N/A
app pub date -
Dec 11, 2002
filing date -
Dec 11, 2002
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Abstract
Light emitting LEDs devices comprised of LED chips that emit light at a first wavelength, and a tinted thin film layer over the LED chip that changes the color of the emitted light. For example, a blue-light emitting LED chip can be used to produce white light. The tinted thin film layer beneficially consists of ZnSe, CeO.sub.2, Al.sub.2 O.sub.3, or Y.sub.2 O.sub.3 :Ce that is deposited using a chemical vapor deposition process, such as metal organic chemical vapor deposition (MOCVD), atomic layer chemical vapor deposition (ALD), plasma enhanced MOCVD, plasma enhanced ALD, and/or photo enhanced CVD. Suitable CVD precursors include Alkoxide, .beta.-dikeonate, Metalloscene, Alkys, DMZn, DEZe, H.sub.2 Se, DMSe, TbuSe, and DESe.
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