Substrate processing device, substrate conveying device, and substrate processing method
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United States of America Patent
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Jun 1, 2004
Grant Date -
N/A
app pub date -
Feb 15, 2000
filing date -
Feb 15, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An unprocessed substrate is conveyed to a film-processing chamber at the same time a processed substrate is conveyed to a substrate preparation chamber, reducing the substrate processing cycle, thereby increasing the yield per unit time. The substrate preparation chamber has a two-tiered structure for receiving processed substrates and unprocessed substrates. A two-tiered transfer robot allows the substrates to be removed or placed into the preparation and process chambers at the same time, thus decreasing the cycle time for processing a substrate.
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