Control of MEMS and light modulator arrays
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United States of America Patent
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May 25, 2004
Grant Date -
N/A
app pub date -
Apr 30, 2003
filing date -
Apr 30, 2003
priority date (Note) -
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Abstract
An array of MEMS devices having column lines and row lines, such as a light modulator array, is controlled in response to an input signal by providing a number of discrete voltages, multiplexing from the discrete voltages a selected voltage to be applied to each MEMS device of the array, and enabling application of the selected discrete voltage to each MEMS device of the array.
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