Precision measurement of wavelengths emitted by a molecular fluorine laser at 157nm
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United States of America Patent
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May 18, 2004
Grant Date -
Jul 17, 2003
app pub date -
Jul 12, 2002
filing date -
Jun 19, 2000
priority date (Note) -
Expired
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Abstract
An excimer or molecular fluorine laser system includes a wavelength calibration module permitting the wavelength of the narrow band output beam to be calibrated to a specific absolute wavelength. The module is preferably a lamp which contains at least one species including platinum with an optical transition within the emission spectrum of the laser system. Light from the lamp is preferably coincident at a spectrometer with a beam portion from the laser, and the laser beam wavelength is calibrated by simultaneous analysis at the spectrograph.
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