Lifting device for substrates
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United States of America Patent
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May 18, 2004
Grant Date -
N/A
app pub date -
Oct 24, 2001
filing date -
Jan 21, 1999
priority date (Note) -
Expired
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Abstract
The aim of the invention is to make it as easy as possible to change a spindle in a lifting device (2) for substrates, which device comprises a support (10). To this end the support is configured such that it can be made to engage the substrate holder (25) by rotation or by pivoting.
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