Semiconductor wafer positioning system and method
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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May 18, 2004
Grant Date -
Mar 6, 2003
app pub date -
Sep 4, 2001
filing date -
Sep 4, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention discloses a positioning system that includes at least three positioner assemblies. Each positioner assembly includes a housing with a coarse adjustment assembly and a fine adjustment assembly disposed within the housing. The positioner assemblies are releasably coupled to a wafer chuck and operable to selectively position the chuck. More particularly, the fine adjustment assembly includes a piezoelectric actuator that is selectively movable between a retracted position and an extended position.
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