Laser with versatile output energy
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United States of America Patent
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May 11, 2004
Grant Date -
Feb 21, 2002
app pub date -
Jan 29, 2001
filing date -
Jan 27, 2000
priority date (Note) -
Expired
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Abstract
A method of operating a laser system for increasing the lifetimes of optical components of the resonator includes the steps of configuring the laser system to initially output laser pulses at an energy in a range above a predetermined energy for industrial lithographic processing, and attenuating the energy of the output pulses to the predetermined energy. A further step includes reducing an amount of attenuation as optics of the laser resonator age to maintain the laser pulses at the predetermined energy, or reducing the amount of attenuation to produce pulses having a higher energy than the predetermined energy.
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