Chirp compensation method and apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6735225
APP PUB NO 20030016708A1
SERIAL NO

10165766

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Abstract

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A wavelength chirp compensation method for an excimer or molecular fluorine laser system operating in burst mode, includes pre-programming into a computer of the laser system resonator tuning optic adjustments for making the adjustments during pauses between bursts to compensate wavelength chirp at beginnings of succeeding bursts.

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Patent Owner(s)

Patent OwnerAddress
LAMBDA PHYSIK AGHANS-BOCKLER-STRASSE 12 D-37079 GOTTINGEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Albrecht, Hans-Stephan Gottingen, DE 22 191
Kramer, Matthias Gottingen, DE 32 729
Niedermeier, Stefan Albertshofen, DE 5 25
Schroeder, Thomas Gottingen, DE 79 454
Serwazi, Marcus Gleichen, DE 7 91

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