Prober for testing light-emitting devices on a wafer
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United States of America Patent
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May 11, 2004
Grant Date -
Jan 30, 2003
app pub date -
Jul 11, 2002
filing date -
Jul 12, 2001
priority date (Note) -
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Abstract
A prober for measuring the light output of digital devices integrally formed on a single wafer. The prober includes a light-integrating sphere sequentially aligned with selected devices. Each time that a device is aligned with the sphere, the device aligned with the sphere is activated, so that the light output of each device is individually measured. In the disclosed embodiment, the devices are vertical cavity surface emitting lasers (VCSELs) and light emitting diodes (LEDs).
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