Method of interbay transportation
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United States of America Patent
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May 11, 2004
Grant Date -
Jun 12, 2003
app pub date -
Apr 4, 2002
filing date -
Oct 18, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An interbay transportation system includes bays in which process equipment are provided, stockers provided for the individual bays, and a vehicle traveling through the stockers for transporting a semi-processed product from one of the stockers to another. Timing to start transportation is determined according to the operation status of the process equipment and the number of semi-processed products in the stocker.
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