Method for manufacturing disk-shaped workpieces with a sputter station
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United States of America Patent
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May 4, 2004
Grant Date -
Oct 10, 2002
app pub date -
May 23, 2002
filing date -
Nov 5, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Method for manufacturing two disk-shaped workpieces using a sputter station includes providing a load-lock chamber and a sputtering source with a sputter surface. A transport chamber interlinks the chamber and source at an opening from the transport chamber to the load-lock chamber and at an opening from the transport chamber to the sputtering source. These openings are opposite each other. A rotatable transport arrangement in the transport chamber rotates around an axis extending between the openings and can carry only two workpieces at a time. The transport arrangement has an extendable/retractable arm arranged radially with respect to the axis. The arm is workpiece carrier to the two disk-shaped workpieces.
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