Method for global automated process control
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United States of America Patent
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Apr 27, 2004
Grant Date -
Jun 27, 2002
app pub date -
Dec 27, 2000
filing date -
Dec 27, 2000
priority date (Note) -
Expired
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Abstract
A method and system to enhance yield in multi-process manufacturing. The method comprising the translation of a performance parameter of a product into input variables to operate tools carrying our cooperating processes which built a structural element which determines the performance parameter, wherein the individual tools are process controlled. The method further comprising the integration of process control of individual separate processes or of stages in a process, into a combined and comprehensive (modular) process control in which the process parameters of a process are enslaved to accomplish the target output of the final process. Hence target output values of intermediate processes are dynamically reassigned during the manufacturing with respect to their initially designed values, in accordance with the output of their cooperating processes.
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