Non-planar micro-optical structures
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United States of America Patent
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Apr 27, 2004
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N/A
app pub date -
Jul 24, 2000
filing date -
Apr 16, 1998
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Abstract
In one embodiment, the present invention provides a microlens having very small focal length. The present invention also provides a non-planar microstructure having a covering layer which is slowly oxidizing of substantially free or oxygen. The present invention also provides methods for forming such microlenses and microstructures. In addition, the present invention provides a VCSEL which includes one or more non-planar microstructures of the present invention.
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