Multi-sectional plasma generator with discharge gaps between multiple elements forming a plasma discharge cavity
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United States of America Patent
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Apr 27, 2004
Grant Date -
Feb 28, 2002
app pub date -
Jul 10, 2001
filing date -
Jul 11, 2000
priority date (Note) -
Expired
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Abstract
A discharge tube is assembled from three sections formed of metal. A first discharge tube element and a second discharge tube element are connected with an insulator for forming a discharging gap and vacuum-sealing interposed between connecting flanges of both discharge tube elements along with an O-ring. The first discharge tube element and a third discharge tube element and a third discharge tube element are connected in a similar manner, and a discharge gap is formed between adjacent discharge tube elements. A high-frequency power supply is connected to each discharge tube element. Respective discharge tube elements are provided with cooling medium flow paths separately each other.
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