Electrostatic sensing chuck using area matched electrodes
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United States of America Patent
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Apr 20, 2004
Grant Date -
Nov 14, 2002
app pub date -
Jan 4, 2002
filing date -
Oct 14, 1998
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Provided is an electrostatic sensing chuck for attracting particles to a portion of a particle contact surface near a deposition electrode, the electrostatic sensing chuck comprising a pixel comprising: a deposition electrode (DE) for selectively establishing an attraction field (E.sub.a) at the particle contact surface; a shield electrode (SE) oppositely biased with respect to the deposition electrode; a charge sensing circuit to measure charge accumulated on each of the deposition electrode and the shield electrode, wherein the charge sensing circuit subtracts a second charge it senses at the shield electrode from a first charge it senses at the deposition electrode, thereby determining accumulated charge at the deposition electrode balanced by accumulated charge at the shield electrode.
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