Method for the sulphidation treatment of III-V compound semiconductor surfaces
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United States of America Patent
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Apr 20, 2004
Grant Date -
Dec 5, 2002
app pub date -
May 30, 2002
filing date -
May 31, 2001
priority date (Note) -
Expired
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Abstract
Method for deoxidizing and passivating, by sulphidation, a surface of a III-V compound semiconductor material undergo strong oxidation in the presence of oxygen, wherein the surface to be passivated is immersed in a dilute aqueous solution containing sulphide ions with a concentration of between about 10.sup.-1 M and 10.sup.-7 M.
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