One-piece cleaning tank with indium bonded megasonic transducer
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United States of America Patent
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Apr 20, 2004
Grant Date -
May 2, 2002
app pub date -
Apr 23, 2001
filing date -
Aug 27, 1999
priority date (Note) -
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Abstract
A megasonic cleaning system comprised of a one-piece cleaning tank, one or more piezoelectric crystals and an indium layer for attaching the piezoelectric crystals to the cleaning tank. The tank comprises a material selected from the group consisting of quartz, sapphire, silicon carbide, silicon nitride, ceramics and stainless steel. The piezoelectric crystals are attached directly to a side or to the bottom of the tank.
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