Supporting fixture of substrate and drying method of substrate surface using the same
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United States of America Patent
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Apr 20, 2004
Grant Date -
Mar 27, 2003
app pub date -
Sep 17, 2002
filing date -
Sep 18, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A supporting apparatus for supporting a substrate in drying a substrate surface of the substrate including a supporting rod having a hollow interior portion and a groove configured to support a substrate on the supporting rod, the groove communicating to the hollow interior portion, a porous material disposed in the hollow interior portion of the supporting rod such that the porous material contacts with the substrate being supported in the groove, and a vacuum device configured to provide suction in the hollow interior portion of the supporting rod.
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