Methods using dry powder deposition apparatuses
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United States of America Patent
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Apr 13, 2004
Grant Date -
Jun 19, 2003
app pub date -
Nov 27, 2002
filing date -
Jun 10, 1998
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Provided is, among other things, a dry deposition apparatus for depositing grains on a substrate comprising: an electrostatic chuck having one or more collection zones, wherein the substrate is layered on the chuck for processing; a charged grain delivery apparatus for directing charged grains for electrostatic deposition on the substrate at the locations of the collection zones; and an optical detection device for quantifying the amount of grains deposited.
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