Catadioptric optical system and exposure apparatus having the same
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United States of America Patent
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Apr 6, 2004
Grant Date -
Dec 26, 2002
app pub date -
Feb 20, 2002
filing date -
Jul 29, 1998
priority date (Note) -
Expired
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Abstract
A projection exposure lens system has an object side catadioptric system, and intermediate image and a refractive lens system. The refractive lens system from its intermediate image side and in the direction of its image plane has a first lens group of positive refractive power, a second lens group of negative refractive power, a third lens group of positive refractive power, a fourth lens group of negative refractive power, and a fifth lens group of positive refractive power.
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