System and method for a digital mass flow controller
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United States of America Patent
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Mar 30, 2004
Grant Date -
Aug 22, 2002
app pub date -
Jan 31, 2002
filing date -
Jul 10, 1999
priority date (Note) -
Expired
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Abstract
A method for controlling the gas flow within a digital mass flow controller. The method calculates a digitally enhanced flow rate signal that more accurately represents an actual flow rate through the digital mass flow controller. The digitally enhanced flow rate is calculated using a sensed flow rate signal output from a flow sensor, a scaled first derivative of the sensed flow rate signal, and a scaled, filtered second derivative of the sensed flow rate signal. A set-point signal is compared to the digitally enhanced flow rate signal to generate a digital error signal. The digital error signal is provided to a digitally realized PI (proportional integral) controller. The PI controller generates a digital control signal which is used to control a valve in the digital mass flow controller.
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