Indirect imaging method for a bonding tool
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United States of America Patent
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Mar 30, 2004
Issued Date -
N/A
app pub date -
Feb 13, 2002
filing date -
Jul 24, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A vision system and method for use with a bonding tool that takes into account variations due to temperature changes and other nonrandom systemic effects. The vision system includes a cornercube offset tool having a plurality of total internal reflection surfaces, the cornercube offset tool located below the vision plane of the optical system; and an optical detector to receive an indirect image of the bonding tool through the cornercube offset tool. The method comprises the steps of providing a cornercube offset tool having a plurality of total internal reflection surfaces below a vision plane of the bonding tool; and receiving an indirect image of the bonding tool through the cornercube offset tool.
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