Method and apparatus for generating periodic structures in substrates by synthetic wavelength holograph exposure
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United States of America Patent
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Mar 23, 2004
Issued Date -
N/A
app pub date -
Jan 2, 1996
filing date -
Aug 26, 1992
priority date (Note) -
Expired
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Abstract
A substrate surface 10 having a photo-sensitive material surface thereon is simultaneously exposed to four plane waves of light at angles of incidence .theta., -.theta., .phi. and -.phi. subtending from the normal of the surface. The four plane waves create an interference pattern on the substrate so as to cause the formation of a periodic structure on the photo-sensitive material surface of the substrate.
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