Method of making diamond product and diamond product
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Mar 23, 2004
Grant Date -
May 30, 2002
app pub date -
Nov 29, 2001
filing date -
Nov 29, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The method of making a diamond product in accordance with the present invention comprises the steps of forming a diamond substrate (50) with a mask layer (52), and etching the diamond substrate (50) formed with the mask layer (52) with a plasma of a mixed gas composed of a gas containing an oxygen atom and a gas containing a fluorine atom, whereas the fluorine atom concentration is within the range of 0.04% to 6% with respect to the total number of atoms in the mixed gas.
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