Method for forming multiple structures in a semiconductor device

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United States of America Patent

PATENT NO 6706571
SERIAL NO

10274951

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Abstract

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A method of forming multiple structures in a semiconductor device includes depositing a film over a conductive layer, etching a trench in a portion of the film and forming adjacent the sidewalls of the trench. The film may then be etched, followed by an of the conductive layer to form the structures.

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Patent Owner(s)

Patent OwnerAddress
GLOBALFOUNDRIES U S INC400 STONEBREAK ROAD EXTENSION MALTA NY 12020

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
An, Judy Xilin San Jose, CA 46 3071
Tabery, Cyrus E Sunnyvale, CA 72 2890
Wang, Haihong Fremont, CA 100 5431
Yu, Bin Cupertino, CA 738 19031

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