Polishing pad support that improves polishing performance and longevity
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United States of America Patent
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Mar 16, 2004
Issued Date -
N/A
app pub date -
Sep 11, 2002
filing date -
Nov 27, 2001
priority date (Note) -
Expired
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Abstract
The present invention provides, polishing pad with improved polishing properties and longevity. The pad is comprised of a thermoplastic foam substrate having a surface comprised of concave cells. A polishing agent coats an interior surface of the concave cells. The invention includes a method for preparing the polishing pad, and a polishing apparatus comprising the polishing pad.
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